方案概述
Core air delivery and filtration equipment for maintaining target cleanliness levels. We supply standard and EC-motor FFUs, HEPA/ULPA filters, and AMC chemical filters for advanced process requirements.
核心特点
Standard sizes 1200×1200 / 1200×600 mm
EC or AC motor options, low noise ≤ 52 dB
Group control systems available
Full filter range: G4 to ULPA U17 + AMC
Compatible with modular ceiling grids
技术规格
数据仅供参考。 不同设备型号与配置的量程、精度与可选配置各不相同。以下数值为该产品线的典型值。具有约束力的规格以针对您项目出具的 datasheet 或技术协议为准 —— 在依据此处任何数值进行设计前，请先向我们索取现行 datasheet。
| FFU Sizes | 1,200 × 600 mm and 600 × 600 mm (2 × 4 ft / 2 × 2 ft) |
|---|---|
| Air Velocity | 0.3–0.6 m/s (59–118 ft/min), adjustable |
| Noise | ≤ 52 dB |
| Filter Grades | HEPA H13–H14, ULPA U15–U17 |
| Special | AMC chemical filters available |
| Electrical | Specified for 480 V / 3-phase / 60 Hz on US projects |
典型应用
▸Full ceiling FFU layout for ISO 5–7
▸Local laminar flow stations
▸AMC-sensitive semiconductor processes
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