Cleanroom Environmental Monitoring & Control Systems
Integrated real-time monitoring and alarming for the parameters that actually decide yield and audit results: temperature, humidity, particle count, oxygen, hazardous gas, noise, vibration and ESD.
方案概述
A cleanroom is only as good as what you can prove about it. We integrate the sensors, controllers and software that continuously record the environmental conditions your process depends on, alarm when they drift, and produce the trend records auditors and customers ask for. Monitoring points are designed together with the room and its air systems, so the data reflects the conditions at the product — not just at the return grille.
核心特点
技术规格
| Parameters | Temperature, humidity, particles, O₂, hazardous gas, noise, vibration, ESD |
|---|---|
| Particle Channels | 0.1 / 0.3 / 0.5 / 5.0 µm (typical configuration) |
| ISO Classification | Monitored per ISO 14644-1; also reported in FS 209E Class terms on request |
| Temp / Humidity Accuracy | ±0.5 °C (±0.9 °F), ±3 %RH (typical; sensor class selectable) |
| Oxygen Range | 0–25 % vol, alarm thresholds configurable |
| Gas Detection | AMC / VOC / acid / base / dopant, ppb to ppm range |
| Noise | Continuous dB(A) logging with threshold alarms |
| Vibration | Velocity / acceleration monitoring to ISO 10816-class methods |
| ESD Coverage | Surface resistance, ioniser balance, grounding, wrist strap |
| Integration | Modbus TCP, BACnet, MQTT, dry contact, REST export |
| Records | Continuous trend logs, alarm history, exportable reports |
典型应用
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