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Cleanroom Environmental Monitoring & Control Systems

Integrated real-time monitoring and alarming for the parameters that actually decide yield and audit results: temperature, humidity, particle count, oxygen, hazardous gas, noise, vibration and ESD.

ISO 5ISO 6ISO 7ISO 8

Overview

A cleanroom is only as good as what you can prove about it. We integrate the sensors, controllers and software that continuously record the environmental conditions your process depends on, alarm when they drift, and produce the trend records auditors and customers ask for. Monitoring points are designed together with the room and its air systems, so the data reflects the conditions at the product — not just at the return grille.

Key Features

Temperature and humidity mapping, with sensor placement matched to process-critical locations
Continuous particle counting across multiple size channels per ISO 14644-1
Oxygen depletion monitoring for confined spaces and inert-gas areas
Hazardous and corrosive gas detection (AMC, VOC, acids, bases, dopants)
Noise monitoring for operator exposure and process-sensitive areas
Vibration monitoring for precision process tools and metrology equipment
ESD and static monitoring: surface resistance, ioniser balance, grounding and wrist straps
Central dashboard with trend logging, alarm escalation and audit-ready reports
Open integration (Modbus TCP / BACnet / MQTT / dry contact) so the data reaches your plant systems

Technical Specifications

Indicative values only. Ranges, accuracy and available options differ between equipment models and configurations. The values below are typical for this product line. The binding specification is the datasheet or technical agreement issued for your project — please ask us for the current datasheet before designing around any figure shown here.
ParametersTemperature, humidity, particles, O₂, hazardous gas, noise, vibration, ESD
Particle Channels0.1 / 0.3 / 0.5 / 5.0 µm (typical configuration)
ISO ClassificationMonitored per ISO 14644-1; also reported in FS 209E Class terms on request
Temp / Humidity Accuracy±0.5 °C (±0.9 °F), ±3 %RH (typical; sensor class selectable)
Oxygen Range0–25 % vol, alarm thresholds configurable
Gas DetectionAMC / VOC / acid / base / dopant, ppb to ppm range
NoiseContinuous dB(A) logging with threshold alarms
VibrationVelocity / acceleration monitoring to ISO 10816-class methods
ESD CoverageSurface resistance, ioniser balance, grounding, wrist strap
IntegrationModbus TCP, BACnet, MQTT, dry contact, REST export
RecordsContinuous trend logs, alarm history, exportable reports

Typical Applications

▸Semiconductor packaging and test areas
▸Advanced packaging lines (flip chip, fan-out, WLP)
▸AI server and CPO / optical module assembly
▸AMC-sensitive processes
▸ISO 14644-2 periodic monitoring and re-qualification

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